Performance

• Capacity 182mm≥16000 wafer/h, 182×182 （12 channels）; 210mm≥12500 wafer/h, 210×210 （10 channels）;
• Transfer speed: 1.0-5.5 m/min;
• Operating speed: 5m/min;
• Breakage rate <0.5‰;
• Uptime ≥98﹪;

Parameter

Cleaning process: Water film→Acidic→Rinse→DRY